Eric C Mattson

2PUBLICATIONS
3CO-AUTHORS
Catalysis and mechanisms of reactionsAerodynamics (excl. hypersonic aerodynamics)
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Publications (2)

|Sep 14, 2018
Selective Growth of Interface Layers from Reactions of Sc(MeCp)

Rezwanur Rahman, Joseph P Klesko, Aaron Dangerfield

|Sep 05, 2018
Thermal Atomic Layer Etching of Silica and Alumina Thin Films Using Trimethylaluminum with Hydrogen Fluoride or Fluoroform.

Rezwanur Rahman, Eric C Mattson, Joseph P Klesko

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Frequent Collaborators

2 joint publications

Rezwanur Rahman

2 joint publications

Joseph P Klesko

2 joint publications

Yves J Chabal