Yongxing Yang

1PUBLICATIONS
2CO-AUTHORS
Lasers and quantum electronics
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Publications (1)

|Jun 26, 2026
High-Precision LCCD-Based Focus Metrology for I-Line Lithography: Multi-Sample Repeatability and Adaptability Evaluation.

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Frequent Collaborators

1 joint publications

Hengrui Guan

1 joint publications

Wuhao Liu