Bibhuti Bhusan Sahu
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|May 27, 2022
Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O2/C4F8 plasma etching process.Bibhuti Bhusan Sahu, Kazuya Nakane, Kenji Ishikawa
|Feb 08, 2017
Shaping thin film growth and microstructure pathways via plasma and deposition energy: a detailed theoretical, computational and experimental analysis.Bibhuti Bhusan Sahu, Jeon Geon Han, Holger Kersten
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