Mattia Pasquali

2PUBLICATIONS
5CO-AUTHORS
Metals and alloy materialsCircuits and systems
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Publications (2)

|Jul 26, 2024
Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms.

Jayant Kumar Lodha, Johan Meersschaut, Mattia Pasquali

|Jan 17, 2023
Area-Selective Deposition of AlO and Al-Silicate for Fully Self-Aligned Via Integration.

Mattia Pasquali, Anita Brady-Boyd, Alicja Leśniewska

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Frequent Collaborators

2 joint publications

Silvia Armini

1 joint publications

Anita Brady-Boyd

1 joint publications

Jayant Kumar Lodha

1 joint publications

Johan Meersschaut