Binghai Lyu
3PUBLICATIONS
0CO-AUTHORS

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Publications (3)
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|Mar 28, 2026
Fusion of Physical Mechanism and Data-Driven Methods for Online Thickness Measurement and Error Compensation in SiC CMP.Junjie Lin, Taotao Chen, Yicheng Ren
|May 14, 2025
Effect of Temperature on Material Removal Rate During Shear-Thickening Polishing.Zhong Yu, Jiahuan Wang, Jiahui Du
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