Jianwei Zhou
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Mar 31, 2025
Enhanced Ruthenium Removal and Superior Surface Quality via Abrasive-Free Chemical Mechanical Polishing Using Synergistic Catalysis with the H2O2/PDS/FeIII-NTA System.Yufei You, Ziwei He, Jianwei Zhou
|Jan 22, 2024
Triple Synergism Effect of Ammonium Nitrilotriacetate on the Chemical Mechanical Polishing Performance of Ruthenium Barrier Layers.Ziwei He, Jianwei Zhou, Yuhang Qi
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