Xaver Klemenschits
2PUBLICATIONS
5CO-AUTHORS
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Publications (2)
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|Mar 29, 2023
Effect of Mask Geometry Variation on Plasma Etching Profiles.Josip Bobinac, Tobias Reiter, Julius Piso
|Dec 02, 2018
Modeling of Gate Stack Patterning for Advanced Technology Nodes: A Review.Xaver Klemenschits, Siegfried Selberherr, Lado Filipovic
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