Pushkar Sathe
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Electronic instrumentation
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Journal of micro/nanolithography, MEMS, and MOEMS : JM3
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May 11, 2026
Relating human and AI-based detection limits in scanning electron microscopy dimensional metrology.
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Peter Bajcsy
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Andras A Vladar
Frequent Collaborators
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joint publications
Peter Bajcsy
1
joint publications
Andras A Vladar
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