Elisa Atosuo
2PUBLICATIONS
4CO-AUTHORS

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Publications (2)
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|Mar 18, 2024
Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films.Elisa Atosuo, Mikko J Heikkilä, Johanna Majlund
|Jul 24, 2023
Atomic layer deposition of CoF2, NiF2 and HoF3 thin films.Elisa Atosuo, Miia Mäntymäki, Leevi Pesonen
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