Byungdu Oh

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1CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Aug 02, 2021
Fabrication of extreme ultraviolet lithography pellicle with nanometer-thick graphite film by sublimation of camphor supporting layer.

Ki-Bong Nam, Jin-Ho Yeo, Qicheng Hu

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Frequent Collaborators

1 joint publications

Ji-Beom Yoo