Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Inhwan Lee

1PUBLICATIONS

1CO-AUTHORS

Nanophotonics

Featured researcher

Get your video featured.

Publish with JoVE

Featured researcher

Get your video featured.

Publish with JoVE

Publications (1)

Sort by Publication Date:

|Aug 11, 2025

Study on Next-Generation EUV Lithography Technology: Hyper NA, the Highest Potential for Practical Implementation.

Inhwan Lee, Joern-Holger Franke, Vicky Philipsen

Pageof 1

Frequent Collaborators

1 joint publications

Eric Hendrickx

Frequent Collaborators

1 joint publications

Eric Hendrickx

Top Related Videos

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on : Sep 14, 2018

See more related videos

Top Related Videos

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on : Sep 14, 2018

See more related videos