Joren Severi
2PUBLICATIONS
2CO-AUTHORS
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Publications (2)
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|Dec 16, 2020
Dielectric Response Spectroscopy as Means to Investigate Interfacial Effects for Ultra-Thin Film Polymer-Based High NA EUV Lithography.Joren Severi, Danilo De Simone, Stefan De Gendt
|Nov 27, 2019
Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation.Juhae Park, Sung-Gyu Lee, Yannick Vesters
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