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Scott M Lewis

2PUBLICATIONS

3CO-AUTHORS

Elemental semiconductorsPhotovoltaic power systems

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Publications (2)

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|Dec 30, 2022

Negative Tone Metallic Organic Resists with Improved Sensitivity for Plasma Etching: Implications for Silicon Nanostructure Fabrication and Photomask Production.

Ahmad Chaker, Hayden A Alty, Paul Winpenny

|Aug 20, 2019

Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal-Organic Resist and Helium Ion Beam Lithography.

Scott M Lewis, Matthew S Hunt, Guy A DeRose

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Frequent Collaborators

2 joint publications

Richard E P Winpenny

1 joint publications

Ahmad Chaker

1 joint publications

George F S Whitehead

Frequent Collaborators

2 joint publications

Richard E P Winpenny

1 joint publications

Ahmad Chaker

1 joint publications

George F S Whitehead

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