Scott M Lewis
2PUBLICATIONS
3CO-AUTHORS
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Publications (2)
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|Dec 30, 2022
Negative Tone Metallic Organic Resists with Improved Sensitivity for Plasma Etching: Implications for Silicon Nanostructure Fabrication and Photomask Production.Ahmad Chaker, Hayden A Alty, Paul Winpenny
|Aug 20, 2019
Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal-Organic Resist and Helium Ion Beam Lithography.Scott M Lewis, Matthew S Hunt, Guy A DeRose
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