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Sangmin Oh

1PUBLICATIONS

5CO-AUTHORS

F-block chemistry

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Publications (1)

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|Aug 28, 2024

Atomistic Simulation of HF Etching Process of Amorphous Si<sub>3</sub>N<sub>4</sub> Using Machine Learning Potential.

Changho Hong, Sangmin Oh, Hyungmin An

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Changho Hong

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Hyungmin An

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Purun-Hanul Kim

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Dongyean Oh

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Seungwu Han

Frequent Collaborators

1 joint publications

Changho Hong

1 joint publications

Hyungmin An

1 joint publications

Purun-Hanul Kim

1 joint publications

Dongyean Oh

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