Ekaterina A Filatova

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0CO-AUTHORS
Chemical thermodynamics and energetics
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Publications (1)

|Apr 11, 2018
Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory.

Ekaterina A Filatova, Dennis Hausmann, Simon D Elliott

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