Jong-Ki An
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Publications (1)
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|Mar 08, 2018
Effect of Growth Temperature on the Structural and Electrical Properties of ZrO₂ Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH₃)₂]₃/C₇H₈ Cocktail Precursor.Jong-Ki An, Nak-Kwan Chung, Jin-Tae Kim
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