Doo San Kim
3PUBLICATIONS
1CO-AUTHORS
Get your video featured.
Publish with JoVEGet your video featured.
Publish with JoVE
Publications (3)
Sort by Publication Date:
|Mar 24, 2024
Plasma enhanced atomic layer deposition of silicon nitride using magnetized very high frequency plasma.You Jin Ji, Hae In Kim, Ji Eun Kang
|Oct 12, 2022
Atomic layer etching of Sn by surface modification with H and Cl radicals.Doo San Kim, Yun Jong Jang, Ye Eun Kim
|May 06, 2022
Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories.Doo San Kim, Ju Eun Kim, You Jung Gill
Pageof 1
