Seong-In Kim
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Mar 26, 2022
Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate.Jun-Myeong Lee, Jong-Chan Lee, Seong-In Kim
|Dec 24, 2021
Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO2-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical-Mechanical Planarization.Seong-In Kim, Gi-Ppeum Jeong, Seung-Jae Lee
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