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Seong-In Kim

2PUBLICATIONS

1CO-AUTHORS

Compound semiconductorsElemental semiconductors

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Publications (2)

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|Mar 26, 2022

Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate.

Jun-Myeong Lee, Jong-Chan Lee, Seong-In Kim

|Dec 24, 2021

Scavenger with Protonated Phosphite Ions for Incredible Nanoscale ZrO<sub>2</sub>-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical-Mechanical Planarization.

Seong-In Kim, Gi-Ppeum Jeong, Seung-Jae Lee

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Frequent Collaborators

2 joint publications

Jea-Gun Park

Frequent Collaborators

2 joint publications

Jea-Gun Park

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