Thomas Langner
2PUBLICATIONS
2CO-AUTHORS
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Publications (2)
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|Apr 05, 2023
About determining reliable etching rates and the role of temperature in kinetic experiments on acidic wet chemical etching of silicon.Anja Rietig, Thomas Langner, Jörg Acker
|Jan 18, 2022
Comprehensive stoichiometric studies on the reaction of silicon in HF/HNO3 and HF/HNO3/H2SiF6 mixtures.Anja Rietig, Thomas Langner, Jörg Acker
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