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Yu-Chen Chang

1PUBLICATIONS

1CO-AUTHORS

Micro- and nanosystems

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Publications (1)

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|Mar 04, 2026

Ultrasmooth Sub-Nanometer Chemical SiO<sub>2</sub> Surfaces and Enhanced Interface Characteristics via High-pH Fluoride Treatment for Si/HfO<sub>2</sub> MOS Devices.

Yu-Chen Chang, Mykhaylo Motylenko, Yu-Tzu Liao

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Frequent Collaborators

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Qing-Tai Zhao

Frequent Collaborators

1 joint publications

Qing-Tai Zhao

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