Yu-Chen Chang

1PUBLICATIONS
1CO-AUTHORS
Micro- and nanosystems
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Publications (1)

|Mar 04, 2026
Ultrasmooth Sub-Nanometer Chemical SiO2 Surfaces and Enhanced Interface Characteristics via High-pH Fluoride Treatment for Si/HfO2 MOS Devices.

Yu-Chen Chang, Mykhaylo Motylenko, Yu-Tzu Liao

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Frequent Collaborators

1 joint publications

Qing-Tai Zhao