Harrison Sejoon Kim
4PUBLICATIONS
8CO-AUTHORS
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Publications (4)
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|Aug 06, 2020
Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source.Yong Chan Jung, Su Min Hwang, Dan N Le
|May 08, 2019
Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide.Harrison Sejoon Kim, Joy S Lee, Si Joon Kim
|Jan 18, 2019
Stress-Induced Crystallization of Thin Hf1- XZr XO2 Films: The Origin of Enhanced Energy Density with Minimized Energy Loss for Lead-Free Electrostatic Energy Storage Applications.Si Joon Kim, Jaidah Mohan, Joy S Lee
|Nov 29, 2018
Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper.Harrison Sejoon Kim, Xin Meng, Si Joon Kim
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