Kazutoshi Kojima

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1CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Oct 31, 2020
Investigation of Factors Influencing the Occurrence of 3C-Inclusions for the Thick Growth of on-Axis C-Face 4H-SiC Epitaxial Layers.

Keiko Masumoto, Kazutoshi Kojima, Hiroshi Yamaguchi

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