Kimihiko Kato

1PUBLICATIONS
3CO-AUTHORS
Quantum engineering systems (incl. computing and communications)
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Publications (1)

|Aug 23, 2021
Electron beam lithography with negative tone resist for highly integrated silicon quantum bits.

Kimihiko Kato, Yongxun Liu, Shigenori Murakami

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Frequent Collaborators

1 joint publications

Yongxun Liu

1 joint publications

Yukinori Morita

1 joint publications

Takahiro Mori