Kyongnam Kim

2PUBLICATIONS
0CO-AUTHORS
Chemical and thermal processes in energy and combustionPowder and particle technology
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Publications (2)

|Aug 07, 2025
Development of a Cleaning Endpoint Evaluation Sensor to reliably monitor plasma chamber cleaning.

Suyoung Jang, Dohyeon Kim, Taehyung Kim

|Jan 11, 2025
A Study on the Development of Real-Time Chamber Contamination Diagnosis Sensors.

Junyeob Lee, Kyongnam Kim

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