Sowon Kim
10PUBLICATIONS
2CO-AUTHORS
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Publications (10)
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|Aug 14, 2025
Fabrication and Characterization of Ferroelectric Capacitors with a Symmetric Hybrid TiN/W/HZO/W/TiN Electrode Structure.Ha-Jung Kim, Jae-Hyuk Choi, Seong-Eui Lee
|Nov 26, 2024
Characterization of HZO Films Fabricated by Co-Plasma Atomic Layer Deposition for Ferroelectric Memory Applications.Won-Ji Park, Ha-Jung Kim, Joung-Ho Lee
|Oct 25, 2024
Enhancing Charge Trapping Performance of Hafnia Thin Films Using Sequential Plasma Atomic Layer Deposition.So-Won Kim, Jae-Hoon Yoo, Won-Ji Park
|Jul 29, 2023
Enhancing the Plasma-Resistance Properties of Li2O-Al2O3-SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation.So-Won Kim, Hwan-Seok Lee, Deok-Sung Jun
|Jun 10, 2023
Preparation of Remote Plasma Atomic Layer-Deposited HfO2 Thin Films with High Charge Trapping Densities and Their Application in Nonvolatile Memory Devices.Jae-Hoon Yoo, Won-Ji Park, So-Won Kim
|Mar 11, 2023
Characteristics of Hf0.5Zr0.5O2 Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory.Da Hee Hong, Jae Hoon Yoo, Won Ji Park
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