Quanquan Sun
4PUBLICATIONS
2CO-AUTHORS
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Publications (4)
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|Apr 27, 2024
Fabrication of Large-Area Silicon Spherical Microlens Arrays by Thermal Reflow and ICP Etching.Yu Wu, Xianshan Dong, Xuefang Wang
|Jul 08, 2023
Inductively Coupled Plasma Dry Etching of Silicon Deep Trenches with Extremely Vertical Smooth Sidewalls Used in Micro-Optical Gyroscopes.Yuyu Zhang, Yu Wu, Quanquan Sun
|Jun 24, 2022
Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.Quanquan Sun, Jiaxuan Tang, Lifeng Shen
|Nov 27, 2021
Fabrication of Antireflection Micro/Nanostructures on the Surface of Aluminum Alloy by Femtosecond Laser.Mengdan Du, Quanquan Sun, Wei Jiao
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