Maxime Legallais

1PUBLICATIONS
2CO-AUTHORS
Nanofabrication, growth and self assembly
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Publications (1)

|Aug 19, 2020
Improvement of AlN Film Quality Using Plasma Enhanced Atomic Layer Deposition with Substrate Biasing.

Maxime Legallais, Hussein Mehdi, Sylvain David

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Frequent Collaborators

1 joint publications

Franck Bassani

1 joint publications

Bassem Salem