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Joseph R Vella

1PUBLICATIONS
0CO-AUTHORS
Sensor technology (incl. chemical aspects)
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Publications (1)

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|Jun 02, 2025
Si-Cl<sub>2</sub>-Ar<sup>+</sup> Atomic Layer Etching Window: A Fundamental Study Using Molecular Dynamics Simulations and a Reduced Order Model.

Joseph R Vella, David B Graves

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