Júlia Karnopp
2PUBLICATIONS
7CO-AUTHORS

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Publications (2)
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|Dec 22, 2023
Novel Energetic Co-Reactant for Thermal Oxide Atomic Layer Deposition: The Impact of Plasma-Activated Water on Al<sub>2</sub>O<sub>3</sub> Film Growth.João Chaves, William Chiappim, Júlia Karnopp
|Oct 14, 2022
Plasma-Assisted Nanofabrication: The Potential and Challenges in Atomic Layer Deposition and Etching.William Chiappim, Benedito Botan Neto, Michaela Shiotani
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