Jungchul Song
3PUBLICATIONS
7CO-AUTHORS
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Publications (3)
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|Dec 16, 2024
Large-scale fabrication of meta-axicon with circular polarization on CMOS platform.Gyu-Won Han, Jaewon Jang, Minsu Park
|Nov 24, 2022
A Study on the Resolution and Depth of Focus of ArF Immersion Photolithography.Jungchul Song, Chae-Hwan Kim, Ga-Won Lee
|Feb 15, 2022
300 mm Large Area Wire Grid Polarizers with 50 nm Half-Pitch by ArF Immersion Lithography.Jungchul Song, Jae Sub Oh, Min Jun Bak
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