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Juhee Hong

2PUBLICATIONS

1CO-AUTHORS

NanomaterialsElectrometallurgy

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Publications (2)

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|May 01, 2025

Composition-dependent properties of ultra-thin MoSi<i></i>based extreme ultraviolet pellicle.

Munsu Choi, Juhee Hong

|Nov 08, 2024

Development and optimization of metal silicide EUV pellicle for 400W EUV lithography.

Munsu Choi, Chulkyun Park, Juhee Hong

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Munsu Choi

Frequent Collaborators

1 joint publications

Munsu Choi

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