Juhee Hong
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|May 01, 2025
Composition-dependent properties of ultra-thin MoSibased extreme ultraviolet pellicle.Munsu Choi, Juhee Hong
|Nov 08, 2024
Development and optimization of metal silicide EUV pellicle for 400W EUV lithography.Munsu Choi, Chulkyun Park, Juhee Hong
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