Guo Zhu

4PUBLICATIONS
0CO-AUTHORS
Powder and particle technologyColloid and surface chemistryRadiation and matterInstruments and techniques
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Publications (4)

|Nov 25, 2023
Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment.

Guo Zhu, Yutong Yang, Baijun Xiao

|Jun 28, 2023
On the Microcrystal Structure of Sputtered Cu Films Deposited on Si(100) Surfaces: Experiment and Integrated Multiscale Simulation.

Guo Zhu, Mengxin Han, Baijun Xiao

|Dec 23, 2022
Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation.

Guo Zhu, Qixin Du, Baijun Xiao

|Nov 11, 2022
Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment.

Guo Zhu, Baijun Xiao, Ganxin Chen

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