Alexey A Klimenko
1PUBLICATIONS
3CO-AUTHORS

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Publications (1)
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|Oct 27, 2022
Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si.Elena I Suvorova, Oleg V Uvarov, Kirill V Chizh
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