Alexey A Klimenko

1PUBLICATIONS
3CO-AUTHORS
Electrical energy generation (incl. renewables, excl. photovoltaics)
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Publications (1)

|Oct 27, 2022
Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiNx/La:HfO2/TiNx Stacks Grown by PEALD on SiO2/Si.

Elena I Suvorova, Oleg V Uvarov, Kirill V Chizh

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