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Chunyan Yin

1PUBLICATIONS

1CO-AUTHORS

Radio frequency engineering

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Publications (1)

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|Jun 27, 2025

An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units.

Yide Dong, Chunyan Yin, Guangbin Dou

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Yide Dong

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