Satoru Yoshimura

2PUBLICATIONS
0CO-AUTHORS
Organometallic chemistryMolecular imaging (incl. electron microscopy and neutron diffraction)
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Publications (2)

|Oct 27, 2021
Low-energy Ar+ and N+ ion beam induced chemical vapor deposition using hexamethyldisilazane for the formation of nitrogen containing SiC and carbon containing SiN films.

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi

|Jun 25, 2021
Identification of fragment ions produced by the decomposition of tetramethyltin and the production of low-energy Sn+ ion beam.

Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi

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