Zhenqiang Yao

3PUBLICATIONS
0CO-AUTHORS
Chemical and thermal processes in energy and combustionDynamics, vibration and vibration controlMicroelectromechanical systems (MEMS)
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Publications (3)

|Feb 27, 2026
Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450.

Guoqing Ye, Zhenqiang Yao

|Apr 26, 2025
Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine.

Guoqing Ye, Zhenqiang Yao

|Mar 06, 2025
Research on Deflection and Stress Analyses and the Improvement of the Removal Uniformity of Silicon in a Single-Sided Polishing Machine Under Pressure.

Guoqing Ye, Zhenqiang Yao

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