Kohei Shima

3PUBLICATIONS
6CO-AUTHORS
Reaction kinetics and dynamicsChemical and thermal processes in energy and combustionCompound semiconductors
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Publications (3)

|Apr 01, 2023
Kinetic study on heterogeneous nucleation and incubation period during chemical vapor deposition.

Kohei Shima, Yuhei Otaka, Noboru Sato

|Oct 29, 2021
Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage.

Kohei Shima, Yuhei Otaka, Noboru Sato

|Oct 30, 2020
Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species.

Kohei Shima, Yuichi Funato, Noboru Sato

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Frequent Collaborators

1 joint publications

Yuhei Otaka

1 joint publications

Noboru Sato

1 joint publications

Yuichi Funato

1 joint publications

Yasuyuki Fukushima