Viktor I Shapovalov

3PUBLICATIONS
1CO-AUTHORS
ElectrometallurgyChemical and thermal processes in energy and combustionReaction kinetics and dynamics
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Journal

Publications (3)

|May 12, 2026
A New Paradigm of Magnetron Target Design.

|Jul 27, 2024
Study of Heat Flow at Substrate during Sputtering of Copper-Titanium Sandwich Target.

Viktor I Shapovalov, Daniil S Sharkovskii

|Apr 28, 2023
Modeling of Reactive Sputtering-History and Development.

Viktor I Shapovalov

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Frequent Collaborators

2 joint publications

Daniil S Sharkovskii