Fumihiro Inoue

2PUBLICATIONS
2CO-AUTHORS
CeramicsComposite and hybrid materials
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Publications (2)

|Sep 03, 2026
Self-Activated Direct Bonding with a Highly Polar Atomic-Layer-Deposited Film for 3D Integration.

|Jul 07, 2025
Material-Mechanistic Interplay in SiCN Wafer Bonding for 3D Integration.

Hayato Kitagawa, Ryosuke Sato, Sodai Ebiko

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Frequent Collaborators

2 joint publications

Hayato Kitagawa

1 joint publications

Akira Uedono