Yonghua Zhao

1PUBLICATIONS
0CO-AUTHORS
Micro- and nanosystems
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Publications (1)

|Jan 12, 2023
Fabrication of Homogeneous Nanoporous Structure on 4H-/6H-SiC Wafer Surface via Efficient and Eco-Friendly Electrolytic Plasma-Assisted Chemical Etching.

Shunda Zhan, Bowen Liu, Xuemeng Yu

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