Kwang-Ho Kwon

2PUBLICATIONS
0CO-AUTHORS
Colloid and surface chemistryCatalysis and mechanisms of reactions
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Publications (2)

|Jul 29, 2023
On Relationships between Plasma Chemistry and Surface Reaction Kinetics Providing the Etching of Silicon in CF4, CHF3, and C4F8 Gases Mixed with Oxygen.

Seung Yong Baek, Alexander Efremov, Alexander Bobylev

|Apr 03, 2021
Dry Etching Performance and Gas-Phase Parameters of C6F12O + Ar Plasma in Comparison with CF4 + Ar.

Nomin Lim, Yeon Sik Choi, Alexander Efremov

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