Miklós Serényi

1PUBLICATIONS
4CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Sep 23, 2022
Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions.

Nikolett Hegedüs, Csaba Balázsi, Tamás Kolonits

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Frequent Collaborators

1 joint publications

Csaba Balázsi

1 joint publications

Tamás Kolonits

1 joint publications

Dániel Olasz

1 joint publications

Katalin Balázsi