Hagen Bartzsch

1PUBLICATIONS
3CO-AUTHORS
Metals and alloy materials
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Publications (1)

|Oct 27, 2022
High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.

Stephan Barth, Tom Schreiber, Steffen Cornelius

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Frequent Collaborators

1 joint publications

Stephan Barth

1 joint publications

Tom Schreiber

1 joint publications

Steffen Cornelius