Seong Jae Yoo

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1CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Aug 02, 2023
Highly selective etching of SiNxover SiO2using ClF3/Cl2remote plasma.

Seong Jae Yoo, Ji Eun Kang, You Jin Ji

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Frequent Collaborators

1 joint publications

Geun Young Yeom