Zhe Ma

4PUBLICATIONS
1CO-AUTHORS
MicroelectronicsMicro- and nanosystemsElectrical energy generation (incl. renewables, excl. photovoltaics)
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Publications (4)

|Jan 08, 2020
Recent Progress of Miniature MEMS Pressure Sensors.

Peishuai Song, Zhe Ma, Jing Ma

|Jan 01, 2020
The Fabrication of Micro/Nano Structures by Laser Machining.

Liangliang Yang, Jiangtao Wei, Zhe Ma

|Jun 13, 2018
A Thin Film Flexible Supercapacitor Based on Oblique Angle Deposited Ni/NiO Nanowire Arrays.

Jing Ma, Wen Liu, Shuyuan Zhang

|Feb 02, 2018
Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices.

Zhe Ma, Yang Liu, Lingxiao Deng

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