Charith E Nanayakkara

2PUBLICATIONS
2CO-AUTHORS
Molecular imaging (incl. electron microscopy and neutron diffraction)Elemental semiconductors
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Publications (2)

|Jan 31, 2018
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride.

Luis Fabián Peña, Eric C Mattson, Charith E Nanayakkara

|May 24, 2017
Reaction Mechanisms of the Atomic Layer Deposition of Tin Oxide Thin Films Using Tributyltin Ethoxide and Ozone.

Charith E Nanayakkara, Guo Liu, Abraham Vega

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Frequent Collaborators

1 joint publications

Luis Fabián Peña

1 joint publications

Yves J Chabal