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Jiyoung Kim

1PUBLICATIONS

1CO-AUTHORS

Lasers and quantum electronics

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|Feb 10, 2017

Impurity and silicate formation dependence on O<sub>3</sub> pulse time and the growth temperature in atomic-layer-deposited La<sub>2</sub>O<sub>3</sub> thin films.

Tae Joo Park, Young-Chul Byun, Robert M Wallace

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Young-Chul Byun

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Young-Chul Byun

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