Dominik Metzler

1PUBLICATIONS
0CO-AUTHORS
Chemical and thermal processes in energy and combustion
Featured researcher

Get your video featured.

JoVEPublish with JoVE
Journal

Publications (1)

|Feb 10, 2017
Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C4F8 and Ar/CHF3 plasma.

Dominik Metzler, Chen Li, Sebastian Engelmann

Pageof 1

Frequent Collaborators