Shigeki Owada

1PUBLICATIONS
8CO-AUTHORS
Nanoelectromechanical systems
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Publications (1)

|Jan 01, 2022
Copper electroforming replication process for soft x-ray mirrors.

Gota Yamaguchi, Hiroto Motoyama, Shigeki Owada

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Frequent Collaborators

1 joint publications

Gota Yamaguchi

1 joint publications

Hiroto Motoyama

1 joint publications

Yuya Kubota

1 joint publications

Satoru Egawa