Jingfeng Zhang
3PUBLICATIONS
3CO-AUTHORS
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Publications (3)
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|Apr 09, 2020
A miniaturized ECR plasma flood gun for wafer charge neutralization.Yaoxiang Jiang, Shixiang Peng, Wenbin Wu
|Mar 02, 2020
The preliminary test of multi-charged ions generation with a 2.45 GHz microwave-driven ion source.TengHao Ma, ShiXiang Peng, JingFeng Zhang
|Jan 03, 2020
Possibility of generating H+, or H2 +, or H3 + dominated ion beams with a 2.45 GHz permanent magnet ECR ion source.Shixiang Peng, Wenbin Wu, Haitao Ren
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